| Model: | CU-1200 PECVD |
|---|---|
| Brand: | CYKY |
| Origin: | Made In China |
| Category: | Chemicals / Other Chemicals |
| Label: | pecvd , pecvd system , pecvd furnace |
| Price: |
US $13000
/ set
|
| Min. Order: | 1 set |
| Last Online:23 Jan, 2015 |
CY-O1200-4CPECVD PECVD System
Brief Introduction:
CY-O1200-4CPECVD is a compact PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system, which consists of 500W RF plasma source, 80mm O.D split tube furnace, 4 channels precision mass flow meter with gas mixing tank, and high quality mechanical pump.
Technical Parameter:
|
Model |
CY-O1200-4CPECVD |
|
|
Tube Furnace |
Display |
LED |
|
Max. Temperature |
1200℃ |
|
|
Continuous Woking Temp. |
≤1100℃ |
|
|
Heating Rate |
0~20℃/min |
|
|
Temperature Zone |
Single |
|
|
Accuracy |
±1℃ |
|
|
Tube Size |
Ф80mm x 1200mm |
|
|
Temperature Control |
PID automatic control via SCR power control |
|
|
Heating curves |
30 steps programmable |
|
|
Power |
220V, 50 Hz, single phase at max. 4KW |
|
|
Plasma RF Power
|
Output Power |
5 -500W adjustable with ± 1% stability |
|
RF frequency |
13.56 MHz ±0.005% stability |
|
|
Reflection Power |
200W max. |
|
|
Matching |
Automatic |
|
|
RF Output Port |
50 Ω, N-type, female |
|
|
Noise |
<50 dB. |
|
|
Cooling |
Air cooling. |
|
|
Power |
220V, 50Hz |
|
|
Ditial Vacuum Gauge |
3.8x10-5 to 1125 Torr measurement range Anti-corrosive, gas-type independent |
|
|
Vacuum Pump and valve |
Heavy Duty Rotary Vane Vacuum Pump with max. vacuum pressure 10-2 torr. KFD25 adapter and stainless steel pipe are connected between pump and tube flange with precision ball valve Digital vacuum pressure gauge and display are installed with the furnace |
|
|
Mass Flow meters |
Four precision mass flow meters : MFC 1: Gas flow range from 0~100 sccm MFC 2&3: Control range from 0~200 sccm MFC 4: Control range from 0~500 sccm One gas mixing tank is installed on bottom case with liquid release valve 4 stainless steel needle valves is installed on left side of bottom case to control 4type gases mixing manually Gas inlet fitting: four 1/4NPS Gas outlet fitting: four 1/4NPS |
|
Contact information:
contact person: Tanya Wang
Mobile: +86 13526477203
Email: labfurnace@163.com
