| Model: | PT-1200T |
|---|---|
| Brand: | Protech |
| Origin: | Made In China |
| Category: | Electronics & Electricity / Electronic Instrument / Laboratory Instrument |
| Label: | PECVD system , CVD system , lab equipment |
| Price: |
US $31670
/ set
|
| Min. Order: | 1 set |
| Last Online:27 Aug, 2015 |
Protech PECVD system for thin film coating
PT-1200T-4CVDPE is a compact CVD system. It consists of Plasma RF power source, split tube furnace, 4 channels mass flow meter with gas mixing tank and high quality mechanical pump. The CVD system is mainly used for deposit thin film even in nano-scale, from a gas state to a solid state, such as, diamond CVD coating, graphene growth, etc.
Outstanding features
1) Solid surface can be threat with plasma power
2) Gas flow can be accurately controlled by the gas mixer
3) Suitable for different material of deposition, including, SiOx, SiNx, SiOxNy and Amorphous silicon (a-Si:H) deposition.
Main technical data
|
Name |
Item |
Data |
|
1) RF power |
Max. power |
500W |
|
|
RF frequency |
13.56MHz |
|
|
Reflection power |
200W |
|
|
RF power output port |
50Ώ |
|
|
Cooling |
208~240VAC |
|
2) Preheating furnace |
Max. temperature |
1200C |
|
|
Working temperature |
0~1150C |
|
|
Temperature control |
Digital programmable and PID automatic control |
|
|
Temperature accuracy |
+/-1.C |
|
|
Working chamber |
Dia. 80x 440x1000mmLength |
|
|
Power supply |
208V~240V, 50/60Hz |
|
3)Anti-corrosive pressure gauge |
Brand |
Inficon |
|
|
Type |
Anti-corrosive, gas-type independent |
|
|
|
high accuracy and reproducibility at atmosphere |
|
|
|
Easy to change plug and play sensor element |
|
4) Vacuum pump set |
Max. Vacuum pressure |
10E-2Torr |
|
|
Type |
Heavy duty rotary vane vacuum pump |
|
|
Model |
PT-RT-4 |
|
5) Gas mixer tank |
|
Four precise MFC with digital display to control the gas flow automatically |
|
|
MFC1 |
Flow range from 0~100sccm |
|
|
MFC2 |
Flow range from 0~200sccm |
|
|
MFC3 |
Flow range from 0~500sccm |
|
|
MFC4 |
Flow range from 0~1000sccm |
|
|
|
The flow range are optional according to your concrete working condition |
|
|
|
Needle valve and connect tubes are also included |
