| Model: | PT-DZ-2LC |
|---|---|
| Brand: | Protech |
| Origin: | Made In China |
| Category: | Industrial Supplies / Rubber & Plastics Machine |
| Label: | plasma cleaner , vacuum plasma cleane |
| Price: |
US $6170
/ set
|
| Min. Order: | 1 set |
| Last Online:27 Aug, 2015 |
Protech plasma cleaner with vacuum pump PT-DZ-2LC
Application
It is used to clean and remove the nanoscale organic contamination on wafer with Argon, Oxygen, or mix gas plasma. The rate of organic removal is about 10 nm/min Max. at PF power.
Outstanding features
Plasma cleaner
Cleaning nanoscale organic contamination
Equipped with vacuum pump
Adjustable RF power
Safe operation and environmental friendly
Suitable for most of the materials such as, metal, semi conductor, oxidate, and most of the high polymer material, etc.
Main technical specification
|
Model |
PT-DZ-2LC |
|
Input power |
AC 110V-220V for your option |
|
The max. current |
<=1.2A (vacuum pump not included) |
|
RF frequency |
40KHz ( offset not more than 0.2KHz) |
|
Concrete resistance protection |
<50Ώ |
|
Vacuum degree |
30Pa~100Pa |
|
Flow range |
10~100mL/min adjustable |
|
Processing control |
MCU manual or automatic for your option |
|
Cleaning time |
1~6000s adjustable |
|
Inside chamber size |
Dia. 100mmx270mm |
|
Gas source input |
Two way basic gas flow control (or more ways for your option) The gas can be Ar, oxygen, air, etc. |