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Protech plasma cleaner with vacuum pump PT-DZ-2LC 1
  • Protech plasma cleaner with vacuum pump PT-DZ-2LC 1

Protech plasma cleaner with vacuum pump PT-DZ-2LC

Model:PT-DZ-2LC
Brand:Protech
Origin:Made In China
Category:Industrial Supplies / Rubber & Plastics Machine
Label:plasma cleaner , vacuum plasma cleane
Price: US $6170 / set
Min. Order:1 set
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Member Information

Detail

Product Description

Protech plasma cleaner with vacuum pump PT-DZ-2LC

Application 

It is used to clean and remove the nanoscale organic contamination on wafer with Argon, Oxygen, or mix gas plasma. The rate of organic removal is about 10 nm/min Max. at PF power.

Outstanding features 

Plasma cleaner 

Cleaning nanoscale organic contamination 

Equipped with vacuum pump 

Adjustable RF power

Safe operation and environmental friendly 

Suitable for most of the materials such as, metal, semi conductor, oxidate, and most of the high polymer material, etc. 

Main technical specification 

Model

PT-DZ-2LC 

Input power 

AC 110V-220V for your option 

The max. current 

<=1.2A (vacuum pump not included) 

RF frequency 

40KHz ( offset not more than 0.2KHz) 

Concrete resistance protection

<50Ώ

Vacuum degree

30Pa~100Pa

Flow range

10~100mL/min adjustable

Processing control 

MCU manual or automatic for your option 

Cleaning time

1~6000s adjustable

Inside chamber size

Dia. 100mmx270mm 

Gas source input

Two way basic gas flow control (or more ways for your option) 

The gas can be Ar, oxygen, air, etc. 


Product Image

Protech plasma cleaner with vacuum pump PT-DZ-2LC 1
Img 1

Send Inquiry to this Member

Zhengzhou Protech Mechanical Equipment Co,. Ltd.

No.11 Zhengshang Road, Zhengzhou City, China

Phone:
86-371-56763132
Fax:
86-371-67103035
Contact:
Jessica Zhang (exporter)
Mobile:
37195607
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