Model: | CL |
---|---|
Brand: | chenli |
Origin: | Made In China |
Category: | Industrial Supplies / Electrical & Electronic Product Equipment |
Label: | Diffusion furnace , Vertical diffusion f , Annealing furnace |
Price: |
¥190000
/ pc
|
Min. Order: | 1 pc |
Last Online:18 Jan, 2025 |
Purpose:
This equipment is used for high-temperature diffusion, sintering, annealing and other processes in semiconductor production processes. The system has a precise instrument control system and a high-purity gas path system with high sealing and corrosion resistance. This device is mainly suitable for processing 8-inch process silicon wafers.
Structural form: Vertical
Operating temperature: 1200 ℃
Constant temperature zone: 750mm
Temperature control accuracy: ± 2 ℃