| Model: | cl |
|---|---|
| Brand: | chenli |
| Origin: | Made In China |
| Category: | Industrial Supplies / Electrical & Electronic Product Equipment |
| Label: | Oxidation furnace , Annealing furnace , Gallium oxide |
| Price: |
¥200000
/ pc
|
| Min. Order: | 1 pc |
| Last Online:04 Feb, 2025 |
This device is used for vacuum annealing, alloying, oxidation, diffusion and other processes in the production process of gallium nitride (GAN) chips. The system has a precise temperature control system and a vacuum pressure control system.
Main parameters:
Working temperature range: 600-1280 degrees.
Operating temperature: 1200 degrees.
Each furnace can process 25 pieces. 25 standard wafer boats.
Effective diameter of furnace tube: suitable for 6-inch pieces, can be compatible with 4 and 2 inches downwards.
Heating power: 18KVA per tube.
Power supply: three-phase five wire system: 380V three-phase five wire.
It has functions such as disconnection, over temperature alarm, and secondary protection.
