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Technology

DKG ONE CF4 analyzer is based on combining ultra sensitive cantilever enhanced photoacoustic detection technology with Quantum Cascade Laser source operating at a Mid-IR fundamental spectral absorption line of CF4. This combination provides enough sensitivity to reliably detect the smallest spills of CF4 without any delay. It also givesan exceptionally high level of stability with a re-calibration period ranging from several months up to several years, and thus it offers a low total cost of ownership.

Benefits

• Accurate, reliable and low maintenance control of cleanroom contamination
• Fast response time to catch rapid spikes
• Standalone system with built-in gas exchange unit
• Requires no consumables or wet chemistry
• Short optical path that provides industry- leading dynamic range with single-point calibration
• Drift-free operation due to direct absorption measurement
• Long re-calibration period (up to years)
• Highly selective against aldehydes and other VOCs

Features

• Selective trace level monitoring of CF4 Below 0.1 ppb limit of detection (LoD)
• Response time user configurable from 10 seconds to few minutes
• Wide dynamic range and stable operation No consumables
• Low sample volume (few ml) Built-in gas exchange system Long re-calibration interval
• User configurable monitoring tasks Intuitive user interface
• Built-in display presents results both numerically and graphically

l Remote operation via local network

Measurement specifications

Response time: dependent on user configu- rable channel integration time (C.I.T.) and gas exchange routine. From approx. 10 seconds to few minutes depending on averaging time and sampling details.

Detection limit: below 0.1 ppb

Dynamic range: over 5 orders of magnitude (i.e. 100 000 times the detection limit)

Repeatability: less than 1 % of measured value in operational conditions at the calibra- tion concentration

Accuracy: Better than 5% at the calibration concentration. Limited by the calibration gas accuracy.

Temperature stability: ambient temperature change within the operational temperature range will not cause drift

Pressure stability: Sample gas pressure change within the pressure range will not cause drift

Environment

Operational conditions: Temperature range: 0°C…+49°C

Humidity: non-condensing

Pressure range: 750 mbar…1050 mbar

Dust/water resistance: IP20 (IEC 529)

Storage conditions:

Temperature range: -20 °C – +60 °C

Sample gas conditions: Temperature: 0 – +49 °C

Humidity: non-condensing, maximum relative humidity 80% for temperatures up to 35°C, decreasing linearly to 35% relative humidity at 49°C

Pressure: 750 mbar…1050 mbar

Gas flow: approx 1 liters/minute

 Particulates < 1 μm