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Vacuum deposition furnace 1
  • Vacuum deposition furnace 1

Vacuum deposition furnace

Model:-
Brand:Jingtan
Origin:Made In China
Category:Industrial Supplies / Machinery / Heater
Label: -
Price: US $20000 / pc
Min. Order:1 pc
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Detail

Product Description

Application scope:  

Graphite, semiconductor devices, heat - resistant scouring materials.  

Vacuum deposition furnace is used for the preparation of carbon carbon composite materials, deposition furnace is mainly used for graphite, semiconductor devices, heat resistant scour material surface pyrolytic carbon coating preparation. 

 

Product Advantage

Vacuum deposition furnace is used for the preparation of carbon carbon composite materials, deposition furnace is mainly used for graphite, semiconductor devices, heat resistant scour material surface pyrolytic carbon coating preparation.  

 

 

 

 

Basic parameters:  

1) Design temperature: 1250℃/1650℃/1800℃/2200℃  

2) Common temperature: 900~1200℃  

3) Vacuum: < 50Pa  

4) Pressure rise rate: empty furnace cold 6.67Pa/h(or 150Pa/24h)   

5) Heating mode: graphite resistance heating or induction heating, independent temperature control, good temperature uniformity  

6) Atmosphere medium: vacuum /CH4/C3H6/H2/N2/Ar  

7) Gas control mode: mass flowmeter control, multi-channel gas path, uniform flow field, no dead Angle of deposition, good deposition effect;  

8) Multi-stage efficient tail gas treatment system, environmentally friendly, easy to clean;

9) Furnace type: square, round, vertical or horizontal structure (non-standard design), fully enclosed deposition chamber, good sealing effect, strong anti-pollution ability;   

10) Furnace body cooling mode: furnace shell water cooling, optional external circulation rapid cooling system, short cooling time, high production efficiency;

 

Furnace body structure:  

Structure: horizontal - side discharging, vertical - upper discharging/lower discharging  

Furnace locking mode: manual/automatic  

Furnace shell material: inner stainless steel/full stainless steel  

Thermal insulation material: carbon felt/graphite felt/carbon fiber cured felt  

Heater, muffle material: graphite /CFC  

Infrared instrument: single color/double color  

Power supply: KGPS/IGBT(only for intermediate frequency heating)  

 

 

 

Product Specification

Parameter/Model

GJC-0305-C

GJC-0505-C

GJC-0608-C

GJC-0612-C

GJC-0812-C

GJC-1120-C

GJC-1218-C

GJC-1520-C

Working Zone Dimension

φ×H(mm)

300×500

500×500

600×800

600×1200

800×1200

1100×2000

1200×1800

1500×2000

Maximum Temperature

℃)

2300

2300

2300

2300

2300

2300

2300

2300

Temperature uniformity℃)

±5

±5

±5/±7.5

±7.5/±10

±7.5/±10

±10/±15

±10/±15

±15/±20

Limit VacuumPa

1-100

1-100

1-100

1-100

1-100

1-100

1-100

1-100

Voltage Rise

Pa/h)

0.67

0.67

0.67

0.67

0.67

0.67

0.67

0.67

Heating Method

Resistance/induction

Resistance/induction

Resistance/induction

Resistance/induction

Resistance/induction

Resistance/induction

Resistance/induction

Resistance/induction


Payment Terms:T/T/LC

Product Image

Vacuum deposition furnace 1
Img 1

Send Inquiry to this Member

Hunan Jingtan Automation Equipment Co., Ltd.

Building B4,Xinma Industrial park,959 Tianyi Avenue,Tianyuan District,Zhuzhou,Hunan Province,China

Phone:
86-731-22418908
Fax:
86-731-28218908
Contact:
Zola Liu (Manger)
Mobile:
18173343568

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