VACUUM LOADING PORT (HHVCE)
Product Description
VACUUM LOADING PORT (HHVCE)
Technical Advantages
Vacuum wafer cassette elevating mechanism
Compatible with 150 200mm wafer cassettes
Advanced automatic door elevating mechanism
Intelligent wafer status detection function
Capable of controlling vacuum pressure
Equips with SMlF Port interface docking
Provides precise wafer positioning and detects protrusion function
Offers various specifications including rectangular and beveled
edges,along with customized options
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