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Electrode Si / SIC
Ring SI / SIC / Quartz
Applicator Quartz / Sapphire

LAM SILICON ELECTRODE SHOWERHEAD

Full Si Electrode

839-011906-001 

839-011906-002

839-011906-100

839-011906-902

Si Electrode

839-443215-502

Silicon/SiC Showerhead

Shower Head, widely used in semiconductor integrated circuit manufacturing process PVD, CVD, PECVD, etching and other processes, 

is a key component in various gas distribution process.

The product has the characteristics of high precision, high cleanliness, multi-composite surface treatment 

(such as sandblasting/anodizing/brush nickel plating/electrolytic polishing).

839-011907-001

Silicon Upper Electrode

839-011907-111

716-140141-261, Hot Edge Ring, 6inch, LAM

1D10-309946-12, DRM Focus Ring

Applicator Sapphire Tube 3750-01112

Applicator

Ring Upper Ground Sic

Sapphire Tube

Y2O3 Top Ring

Y2O3 Bottom Ring