Cartridge Dispense System (CDS)
Product Description
Cartridge Dispense System (CDS) :
We provide the track products in the following areas:
The CDS capabilities include:
- Dispenses most lithographic chemistries in both low and high viscosity
- Dispense Accuracy ±0.1ml
- 175 ml capacity permits processing a full cassette of wafers without refilling
- Low hold-up volume(5.6 ml with 26 inches of dispense tubing)
- Depressurized between dispenses to prevent N2 absorption.
- Low cost
- Disposable cartridge liners eliminate crosscontamination
- Direct interface to Tractrix™ Compact Spin Track and SpinBall™ Process Station
- Interface available for other track systems
We provide “ESVG” (Enhanced SVG) 81- & 86-series track equipment. ESVG is your guarantee this SVG system includes the best of our designed and manufactured upgrades. Our ESVG products include enhanced: coater cup, drains, hot plate modules, sensors, electronic controls and more.
ESVG 81 & 86 Systems
We can provide rebuilt 8126, 8132, 8626, or 8632 series systems in our Santa Clara factory. Or, if you have a used or worn-out system, we can regenerate (refurbish and upgrade) it for you.
Product Image
Img 1
Send Inquiry to this Member
Related Products of this Company
This member assumes full responsibility for the content of this listing. DIYTrade accepts no responsibility whatsoever in respect of such content.
To report fraudulent or illegal content, please
click here.
China Suppliers Quick Searching:
,