Semiautomatic submicron prober, 8" (8"半自動亞微米探針台)
X/Y resolution: 0.2 micron (X/Y向分辨率:0.2微米)
Linear motors (線性電機)
Software with graphical unit interface and joystick manual control (軟件包括圖形單元接口和操縱杆的人工控製程序)
RF and light shield (RF和遮光罩)
(10) Vacuum and RF probe connectors (10個真空RF電探針連接器)
Dual purge flowmeters (雙重清洗流量計)
KINETIC SYSTEMS isolation table (KINETIC SYSTEMS隔離台)
SA-Zoom microscope (SA變焦顯微鏡)
MITUTOYO objective (MITUTOYO物鏡)
Motorized X/Y travel (機械化X/Y行進)
Wafer chuck not installed (晶圓卡盤未安裝)
2001 vintage.(生產日期:2001年)