Crystal Materials: 99,996% of Al203, High Purity, Monocrystalline, Al2O3

Crystal quality: Block marks, twins, Color, micro-bubbles and dispersal centers are non-existent.

Diameter: 2", 3", 4", 5" ~ 7"

In accordance with the provisions of standard production

Thickness: 250±15 µm, 330±15 µm, 430±15 µm, 500±15 µm, 550±15 µm, 650±15 µm

In accordance with the provisions of standard production

Orientation: C- plane (0001) to M-plane (1-100) or A-plane (1 1-2 0) 0.2°±0.1°/0.3°±0.1°,

                      R-plane (1-1 0 2), A-plane (1 1-2 0), M-plane (1-1 0 0); Any orientation, Any angle.

In accordance with the provisions of standard production

Primary flat Orientation: A-plane (1 1-2 0) ± 0.2°
Primary flat length: 16.0±0.8 mm, 22.0 ±1.0 mm, 32.5±1.5 mm

TTV ≤10 µm ≤15 µm ≤20 µm ≤30 µm
LTV ≤ 5 µm ≤10 µm ≤15 µm ≤20 µm
TIR ≤10 µm ≤15 µm ≤20 µm ≤30 µm
BOW ≤10 µm ≤15 µm ≤20 µm ≤30 µm
Warp ≤10 µm ≤15 µm ≤20 µm ≤30 µm

Front Surface: Epi-polished, Ra< 0.2 nm (By AFM)

Back Surface: Fine ground (Ra=0.5 to 1.2 µm) or Epi-polished (Ra< 0.2 nm).

Cleaning/packaging: 100 clean room cleaning, vacuum packaging derived nitrogen

Note: In accordance with the special requirements of customers, providing high-quality sapphire substrate.