A Cold Field Emission Gun Scanning Electron Microscope (FEGSEM) of "below-the-lens" design capable of (manufacturer's claims) 1.5 nm resolution at 15 kV, 12 mm W.D.; and 2.5 nm resolution at 1 k, 2.5 mm W.D. Magnification ranges from 30X to 500,000X. Specimen tilt at 12 mm W.D up to 45 degrees. Electron source is a cold FE gun producing high brightness (~ 2 X 109 A / cm2/sr) with little energy spread (0.2 - 0.3 eV). The "below-the-lens" design and large sample chamber port permits samples as large as 100 mm diameter X 17 mm thick H. Oil-free vacuum systems pump column and sample exchange. Available image modes include secondary and backscattered electron images. There are two secondary electron detectors; one above the objective lens, the other below. Digital images may be acquired in BMP, TIFF, or JPEG file formats at 640 X 480, 1280 X 960, or 1560 X 1920 pixels.

An Emitech cryo stage is available for use with samples prepared in the Emitech K-1250 Cryopreparation / Cryotransfer System shown below.
Specifications

Specimen Stage, Non-Cryo Traverse X: 0 ~ 25 mm 

Traverse Y: 0 ~ 25 mm 

Traverse Z: 2.5 ~ 27.5 mm 

Traverse T: -5 ~ +45 degrees 

Traverse R: 360 degrees 

Drive: Manual 
pecimen Stage, Cryo Traverses similar to above, but rotation limited to 30 degrees clockwise, and 180 degrees counterclockwise, from zero point.