Spin coater

Spin coater
Model:JS401
Brand:Jaesung Engineering Co.
Origin:Made In Korea
Category:Electronics & Electricity / Other Electrical & Electronic
Label: -
Price: -
Min. Order:1 pc
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Product Description

 

Spin coater, JS401

Specification

Programmable 20 steps, 20 recipes stored

 

PLC and Touch panel operation

 

Acuracy +- 1 RPM

 

Max RPM: 6,000

 

Programmable Acceleration: 1,000RPM/sec. 20,000RPM/ sec. without load

 

SUS304 body and bowl

for easy cleaning and chemical resistance

 

Drain port

 

Clear PC cover for bowl

 

Max 100~200mm diameter wafer

 

Standard simultaneous dispense capability expanded upto 4 units(w/ pressure tanks)

Photoresist, EBR, HMDS, BSR or Developing

 

Standard dry vacuum pump: 100 liter/ min, 0.5 ATM

 

Standard sample chuck

 

Dimension K00W x K00D x 275H mm

 

220VAC, 60Hz, 5 amp

 

Weight:    Kg

Spin coater 1Spin coater 2

Member Information

Jaesung Engineering
Country/Region:China
Business Nature:Manufacturer
Phone:82-31-479-1459
Contact:Chulmook Ji (Sales)
Last Online:30 Dec, 2017

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