PRODUCT NAME
Carbon tetrafluoride R14
CAS ：75-73-0
Molecular formula: CF4
PHYSICAL PROPERTIES
Melting point
-183.6℃
Boiling point
-128.1℃
Liquid density
（-130℃）1.613g/cm3
Critical temperature ℃
-45.67℃
Critical pressure MPa
3.73MPa
Critical density
7.1dm3/mol
 It is colorless, odorless gas with easy compressibility and stability under normal temperature. It only decomposes gradually under carbon arc temperature. It is nonflammable gas slightly soluble in water.
APPLICATION SCOPE
  Carbon tetrafluoride can be widely applied on etching of silicon, silicon dioxide, silicon nitride, phosphorosilicate glass and tungsten film materials, cleaning on surface of electron device, production of photovoltaic cell, laser technology, aerospace technology, metal smelting, gas phase insulation and cryogenic-refrigeration. Additionally, the recent research found that it has great ability in oxygen dissolving, which can be applied to substitute compressed air in ultra deep diving. The experiment has been successful at present.