Tetramethyl ammonium hydroxide

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Brand:TMAH
Origin:-
Category:Chemicals / Fine Chemicals
Label:TMAH , TMAH 75-59-2
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Product Description

1. In-stock Fresh New Batches; 
2. Quick Order Schedule; 
3. Electronic Grade; 
4. Positive Resister Developer 
 

 

Tetramethyl ammonium hydroxide 25% electronic grade

 

Tetramethylammonium hydroxide (TMAH or TMAOH) is a quaternary ammonium salt with the molecular formula [(CH3)4N]+[OH]-, and is the simplest member of the class of organic quaternary ammonium compounds. One of its industrial uses is for the anisotropic etching of silicon. It is also used as a basic solvent in the development of acidic photoresist in the photolithography process. Since it is a phase transfer catalyst, it is highly effective in stripping photoresist. It is also used as a surfactant in the synthesis of ferrofluid, to prevent agglomeration.

 

Description Colorless transparent liquid.
  Structural Formula: (CH3)4NOH
  Formula Weight: 91.15

 

Specifications Item Unit MIN MAX
  Assay % 24.90 25.10
  Color Hazen   5
  CO32-     (Carbonate) ppm   100
  Cl-       ( Chloride ) ppm   0.1
  CH3OH          (Methanol) ppm   40
  Li (Lithium) ppb   5
  Na (Sodium) ppb   10
  Mg (Magnesium) ppb   5
  Al (Aluminium) ppb   10
  K (Potassium) ppb   10
  Ca (Calcium) ppb   10
  Cr (Chromium) ppb   5
  Mn (Manganese) ppb   5
  Fe (Iron) ppb   5
  Ni (Nickel) ppb   5
  Co (Cobalt) ppb   5
  Cu (Copper) ppb   5
  Zn (Zinc) ppb   5
  Mo (Molybdenum) ppb   5
  Cd (Cadmium) ppb   5
  Pb (Lead) ppb   5
  Ag (Silver) ppb   5
  Particle >=0.5um Ea/ml   100

 

Physical Properties* Form Liquid
  Boiling Point,°C 100.0
  Freezing point, °C <-25.0
  Viscosity@ 25 °C,cst 2.8
  Specific Gravity @ 60 °F 1.022
  Flashpoint (Pensky Martens), °F >200
  pH >13

 

Usage widely used in electronic industry , especially as positive resister developer ,silicon wafer wet etchant and super clean solution for CMP process.

 

Shipping Information Containers
  200L clean drum
  Other containers available upon request.
  Shipping Classification
  Proper shipping name: tetramethylammonium hydroxide
  Hazard classification: 8
  Identification number: UN1835, PGII

 

Safety and Handling For specific safety and handling information please refer to the
  Material Safety Data Sheet which is available upon request.

 

Chemical Registration Numbers CAS 75-59-2
  EINECS 200-882-9
  NIOSH/RTECS PA0875000

 

Remarks* Tetramethylammonium Hydroxide(2.380%,20.0%,electronic grade), TMAH (25%, 98%,industrial grade) are also available, please contact us for details.

 

 

Tetramethyl ammonium hydroxide 25% 

Member Information

Wo Hing Water Treatment Co., LTD
Country/Region:Hu Bei - China
Business Nature:Manufacturer
Phone:59701876
Contact:Nimo.Shi (Director)
Last Online:05 May, 2014

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