Model: | - |
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Brand: | TMAH |
Origin: | - |
Category: | Chemicals / Fine Chemicals |
Label: | TMAH , TMAH 75-59-2 |
Price: |
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Min. Order: | - |
1. In-stock Fresh New Batches;
2. Quick Order Schedule;
3. Electronic Grade;
4. Positive Resister Developer
Tetramethyl ammonium hydroxide 25% electronic grade
Tetramethylammonium hydroxide (TMAH or TMAOH) is a quaternary ammonium salt with the molecular formula [(CH3)4N]+[OH]-, and is the simplest member of the class of organic quaternary ammonium compounds. One of its industrial uses is for the anisotropic etching of silicon. It is also used as a basic solvent in the development of acidic photoresist in the photolithography process. Since it is a phase transfer catalyst, it is highly effective in stripping photoresist. It is also used as a surfactant in the synthesis of ferrofluid, to prevent agglomeration.
Description | Colorless transparent liquid. |
Structural Formula: (CH3)4NOH | |
Formula Weight: 91.15 |
Specifications | Item | Unit | MIN | MAX |
Assay | % | 24.90 | 25.10 | |
Color | Hazen | 5 | ||
CO32- (Carbonate) | ppm | 100 | ||
Cl- ( Chloride ) | ppm | 0.1 | ||
CH3OH (Methanol) | ppm | 40 | ||
Li (Lithium) | ppb | 5 | ||
Na (Sodium) | ppb | 10 | ||
Mg (Magnesium) | ppb | 5 | ||
Al (Aluminium) | ppb | 10 | ||
K (Potassium) | ppb | 10 | ||
Ca (Calcium) | ppb | 10 | ||
Cr (Chromium) | ppb | 5 | ||
Mn (Manganese) | ppb | 5 | ||
Fe (Iron) | ppb | 5 | ||
Ni (Nickel) | ppb | 5 | ||
Co (Cobalt) | ppb | 5 | ||
Cu (Copper) | ppb | 5 | ||
Zn (Zinc) | ppb | 5 | ||
Mo (Molybdenum) | ppb | 5 | ||
Cd (Cadmium) | ppb | 5 | ||
Pb (Lead) | ppb | 5 | ||
Ag (Silver) | ppb | 5 | ||
Particle >=0.5um | Ea/ml | 100 |
Physical Properties* | Form | Liquid |
Boiling Point,°C | 100.0 | |
Freezing point, °C | <-25.0 | |
Viscosity@ 25 °C,cst | 2.8 | |
Specific Gravity @ 60 °F | 1.022 | |
Flashpoint (Pensky Martens), °F | >200 | |
pH | >13 |
Usage | widely used in electronic industry , especially as positive resister developer ,silicon wafer wet etchant and super clean solution for CMP process. |
Shipping Information | Containers |
200L clean drum | |
Other containers available upon request. | |
Shipping Classification | |
Proper shipping name: tetramethylammonium hydroxide | |
Hazard classification: 8 | |
Identification number: UN1835, PGII |
Safety and Handling | For specific safety and handling information please refer to the |
Material Safety Data Sheet which is available upon request. |
Chemical Registration Numbers | CAS 75-59-2 |
EINECS 200-882-9 | |
NIOSH/RTECS PA0875000 |
Remarks* | Tetramethylammonium Hydroxide(2.380%,20.0%,electronic grade), TMAH (25%, 98%,industrial grade) are also available, please contact us for details. |
Tetramethyl ammonium hydroxide 25%
Wo Hing Water Treatment Co., LTD | |
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Country/Region: | Hu Bei - China |
Business Nature: | Manufacturer |
Phone: | 59701876 |
Contact: | Nimo.Shi (Director) |
Last Online: | 05 May, 2014 |