Tyy-mc series: We developed the rotary three-targets magnetron sputtering technology together with the new energy center of peking university and used it to produce tyy-mc series (double m-aln cermets layers) tube which has the advantages of highest thermal efficiency (0. 96); Lowest emittance rate (<0. 04/20c) and working effectively with the high temperature of 300-350c in the contrast to the normal evacuated tube. The corresponding film structure is aln/m-aln(lmvf)-m-aln(hmvf)/cu.
Lmvf: Low metal volume fraction
Hmvf: High metal volume fraction