Adoption of integrated granite-material guide ways makes sure of stable thermal performance of themselves;

The mechanical structure has the Characteristics of strong rigidity and small geometric errors;

Adoption of collision-avoidance protection improves measurement’s safety;

21 terms of compensation technique as to mechanical geometric errors improve the machine’s precision greatly;

Y-Axis guide way adopts dove tail type,which has high precision and good stability;

Z-axis adopts cylinder equilibrator system,which improves orientation precision and stability greatly for Z axis;

Adoption of advanced F.E.M(finite element method) makes it have a stable and reliable resistance of effective deformation.