Cantilever paddles are key parts of wafter loading and transfering system in semiconductor and solar industry. It is used in diffusion furnace to position semiconductor wafer boats. Cantilever paddles made from silicon carbide are characterized by high purity and widely used in semiconductor fabricators whose processes require high purity components to prevent contamination. 

Sinri can offer silicon carbide cantilever paddles of 3 meters length to realize higher wafter throughput in larger reactor.  Even more wafers loade under high temperature, silicon carbide cantilever paddle will not deform and achieve zero deflection.

The features of silicon carbide cantilever paddles are:

1. High purity without contamination during wafer fabrication

2. Stable mechanical property

3. High strength and rigidity under high temperature

4. No deflection under high temperature

5. Achieve maximum wafer loading