CVD System consists of tube furnace,gas supply system and vacuum unit.

Split vacuum tube furnace

BTF-1200C

BTF-1200c can supply vacuum&atmosphere protection environment .

It is easy to installation and dispatch.From the transparent quartz chamber,the state of sintering can be observed.

Pneumatic spring structure make the operator easy to open it.

Tube size

Φ50 ×1000mm（tube size can be optional)

Heating element

Fe-Cr-Alloy adopted by Mo

Zone length

Heating :440mm   Constant:200mm

Temperature controller

*30 programmable segments for precise control of heating rate ,cooling rate and dwell time.

*Built in PID automatic tune function with overheating&brocken  thermocouple brocken protection and over temperature protection and alarm allows for operation without attendants.

Accuracy

±1℃

S est heating rate

15℃/min

Standard accessories

quartz tube 1 pcs,stainless steel sealing flange 1set,silicon sealing ring 2set,high temperature glove1pair,quartz block1 pc.

Gas-supply system 3 channels MFC,GMF-3Z     

Connector style

Double cutting ferrule stainless steel connector

Standard range(N2)

50sccm、100sccm、200sccm(optional)

Accuracy

±1.5%FS

Linearity

±0.5～1.5%

Working pressure range

0.1～0.5 MPa

Max.pressure

3MPa

Connector

Φ6,1/4''

Display

LCD touch screen 3 figrues show

Working tem. environment

5~45 High purity gas

Pressure vacuum gauge

-0.1~0.15 MPa（0.01 MPa/grid）

Inter&exter Parabolic ss pipe

Φ6

Low vacuum unit，Vau-02

Relative air humidity

≤85%

Working voltage

220V±10%  50~60HZ

Air bleed rate

8m³/h

Experiment vacuum

1.0X10-1Pa

Oil capacity

1.1L

Inlet/Outlet caliber

KF25

Rotation rate

1450rpm

Noise

50dB