desktop type 2-target RF DC magnetron co-sputtering lab machine

desktop type 2-target RF DC magnetron co-sputtering lab machine
Model:CY-MSP210S-RFDC
Brand:CYKY
Origin:Made In China
Category:Electronics & Electricity / Electronic Instrument / Laboratory Instrument
Label:magnetron sputtering , DC sputtering , RF sputtering
Price: -
Min. Order:1 pc
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Product Description

CY-MSP210S-RFDC desktop dual-target magnetron sputtering coating instrument. The equipment has been miniaturized, while retaining the high-vacuum stainless steel cavity, while simplifying other mechanisms, limiting the shape of the equipment to the desktop level, greatly reducing the installation site requirements. The equipment is equipped with a DC power supply and an RF power supply. The DC target can be used for sputtering of metals and other conductive materials. The RF power supply can be used for sputtering of various non-metals and metal oxides. The equipment vacuum system adopts all imported vacuum pumps, with fast pumping speed, high ultimate vacuum and excellent vacuum performance. The equipment has compact structure, perfect functions and easy to use. It is very suitable for various coating tests.

Technical parameter

Desktop type double target magnetron sputtering coater

Sample stage

 

Size:φ150mm;heating Up to 500℃;Rotating speed:0-20 adjustable

Magnetron sputtering target

2” x2 dual targets share a baffle

Vacuum chamber

Cavity size:φ210mm X 230mm

Observation window:φ40mm

Cavity material:SS304 stainless steel

Opening method:Front door

Vacuum system

Mechanical pump:Imported oil-free diaphragm pump Pumping interface:KF16

Molecular pump:Imported molecular pump

Pumping interface:KF40

Vacuum measurement:Resistance gauge + ionization gauge

Exhaust interface:KF16

Ultimate vacuum:1.0E-3Pa

Power supply:AC 220V 50/60Hz

Pumping rate:Oil-free pump 0.49L/s Molecular pump: 40L/S

Sputtering power

DC power supply x1 RF power supply x1

Maximum output power DC power supply 500W RF power supply 500W

 

other

Supply voltage:AC220V, 50Hz

Overall size:550mm X 550mm X1100mm

Total power:2kW

 

desktop type 2-target RF DC magnetron co-sputtering lab machine  1

Member Information

Zhengzhou CY Scientific Instrument
Country/Region:He Nan - China
Business Nature:Manufacturer
Phone:13837189935
Contact:jibin wang (sales manager)
Last Online:17 Aug, 2020