Models

S-Closed loop

K-Open loop

P15.XYZ300S
P15.XYZ300K

Untis

Active axes

X、Y、Z

Travel range(0~120V)

240

μm±20%

Travel range(0~150V)

300

μm±20%

Integrated sensor

SGS

Aperture

60*60

mm

Closed/open loop resolution

13/6

nm

Closed-loop linearity

0.2

%F.S

Repeatability

0.1

%F.S

Pitch/Yaw/Roll

<30

μrad

Push/pull force capacity

50/10

N

Stiffness

0.1

N/μm±20%

Unloaded resonant frequency

450/550/120

Hz±20%

Closed/open-loop unloaded Step time

60/10

ms±20%

Unloaded operating frequency

10% Travel

50

Hz±20%

100% Travel

10

Load capacity

0.5

kg

Electrical capacitance

10.8/axis

μF±20%

Material

Alunminum

Mass

900

g±5%