The 2.5D&3D system has the function of conventional 2D galvanometer, and a zoom module is added on the basis of the conventional galvanometer, which solves the problem that the traditional laser scanning galvanometer can only realize plane scanning and small range scanning, and can complete laser processing system applications requiring dynamic zoom. Mainly used in glass drilling, 3D curved marking, welding, laser digging groove, step surface marking and so on. At the same time, this galvo head has the characteristics of high precision, high stability and support for function customization.