Number of furnace tubes: 1-4 tubes

Process pipe diameter: Φ 90-360 mm (3-12 inches)

Length of constant temperature zone: 760～1000 mm±1.0℃ (300～800℃)  760～1000 mm±0.5℃(800～1280℃)

Single point stability: ±1.0℃/24h (300～800℃)    ±0.5℃/24h (800～1280℃)

Number of gas sources: ≤ 7, can be equipped with constant temperature source bottle and hydrogen oxygen synthesis igniter

Gas Control: Float/Mass Flow Meter

Cantilever boat parameters: speed: 20-1000 mm/min Travel: 2000 mm Positioning accuracy: ± 1 mm Load: 17 Kg

Ultra clean workbench: Purification level: 100 level (10000 level factory building)

Noise: ≤ 62dB（A）

Vibration: ≤ 3μm