Model: | - |
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Brand: | - |
Origin: | Made In China |
Category: | Electronics & Electricity / Electronic Components / Other Electronic Components |
Label: | Sapphire wafer , GaAs wafer , InP wafer |
Price: |
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Min. Order: | - |
a). C-plane 0.20 or 0.30 off to M
Surface Orientation C[0001] off M [1-100] 0.20 ± 0.10(target ± 0.050) / 0.30 ± 0.10
Diameter 50.8mm ± 0.1mm
Thickness 430um ± 10um
Major Flat A [11-20] ± 0.5°
Major Flat Length 16.0mm ± 1.0mm
Front Surface Finish Epi-ready polished, Ra< 0.2 nm
Back Surface SSP: Fine ground, Ra 0.4 to 1.0 um; DSP: Epi polished
Edge condition Edge defects not to exceed SEMI M3-91
Flatness TTV<10um, BOW <10um, Warp<10um
b). R-plane ±0.10
Surface Orientation R[1-102] ± 0.10
Diameter 50.8mm ± 0.1mm
Thickness 430um ± 10um
Major Flat 45°± 2° counter-clockwise from the projection of the C-axis onto the R-plane
Major Flat Length 16.0mm ± 1.0mm
Front Surface Finish Epi-ready polished, Ra< 0.3 nm
Back Surface SSP: Fine ground, Ra 0.4 to 1.0 um
Edge condition Edge defects not to exceed SEMI M3-91
Flatness TTV<10um, BOW <10um, Warp<10um
c). A-plane ±0.10
Surface Orientation A [11-20] ± 0.10
Diameter 50.8mm ± 0.1mm
Thickness 430um ± 10um
Major Flat C [0001] ± 0.5°
Major Flat Length 16.0mm ± 1.0mm
Front Surface Finish Epi-ready polished, Ra< 0.3 nm
Back Surface SSP: Fine ground, Ra 0.4 to 1.0 um
Edge condition Edge defects not to exceed SEMI M3-91
Flatness TTV<10um, BOW <10um, Warp<10um
Packaged in a class 100 clean room environment, in single fluroware (samples) or cassettes of
25pcs (for official order) under a nitrogen atmosphere
Epistone Comp-Semi Materials Company Ltd. | |
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Country/Region: | Guang Dong - China |
Business Nature: | Manufacturer |
Phone: | 86-0755-89922158 |
Contact: | Miss Huang (Sales) |
Last Online: | 08 Jan, 2010 |