Quality thermal gas mass flow meter measured flow rate equivalent to the volume flow under standard conditions, the mass flow units expressed as SCCM (standard mL per minute) or SLM (standard liters per minute). Standard state refers to a pressure of one atmosphere (101325Pa), a temperature of 0oC. Usually when the factory calibration with nitrogen. When users use other gases, gas conversion factors can be provided in the manual reading amendments or proposed to convert the calibration based on the use of gas, if feasible, can also require the company to gas actually used for calibration. SONIC series flow meter can display and mass flow meter / mass flow controller used in conjunction to provide operating power and traffic displayed by the former.

[Features]
● Range: 5,10,20,30,50,100,200,300,500SCCM, 1,2,3,5,10 ...... 2000SLM
● Accuracy: ± 1% F.S
● Linearity: ± 0.5 ~ 1% F.S
● Repeatability: ± 0.2% F.S
● Response time: 10S
● Pressure drop: <0.01MP
● Maximum pressure: 10MP
● Working temperature: 5 ~ 45 ℃
● Output Signal: 0 ~ + 5.00V
● Power: + 15V 50mA -15V 200mA
● Dimensions: 158.7 * 60 * 60 * 198 * 198,161.7 optional
● Weight: 2.5 Kg
● Explosion-proof grade: Exd II BT6