Mass flow meters and Controllers:
Model 3660 Series Mass Flow Con trol ler has been de vel -
oped cen ter ing the focus on com pact ness and low cost
and is being ac claimed by a wide range of users for diverse
ap pli ca tions, in clud ing from lab o ra to ry research and
development activities to the use as a standard mass fl ow
control model for various types of analyzers and vacuum
devices in the production line. Varieties of de rived models
and options are available.
• Equipped with an advanced fl ow sensor of constant-current temper
a ture difference detection type to ensure high-speed re sponse
• Use of a normally closed valve to ensure safety
• High reliability ensured using a solenoid actuator
• Low differential pressure type control available for combustible
gases (LP option)
In comparison with the conventional mechanical products, the mass flow measurement/control (MFC)technology used in a mass flow meter and controller extracts electrical signals from the flow without significantly influencing the temperature or pressure, thus permitting sophisticated flow measurement and control. The technology is widely used for manufacturing semiconductors, liquid crystal, optical fibers and other electronic devices, gas supply for fuel cells, and fuel gas control for burners, foods, biotechnology, as well as for experimental facilities and production/inspection systems in many other industries.
Global Nanotech Equipmentprovides high qualitynew Material and Lab Equipment, used, 2nd hand, rebuilt and refurbished Metrology Equipment(CD-SEM. FESEM, SEM, FIB),Electronic Test Equipment and other semiconductor equipment ,quartz, ceramic,silicon carbide,silicon parts.
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