Introduction

Traditional die casting aluminum floor is difficult to deal with high loading raised flooring system demands for the future 7th , 8th generations' LCD and post 300 mm wafer machines. In res- ponse to this market trend Kaori has innovated a high loading steel flooring system for clean room application to give maximum mechanical strength through a series of manufacturing process including pressing, assembling, brazing and heat treatment. Kaori's steel flooring system is a viable and economical options besides aluminum floors, mainly due to features such as competitive cost, safe and easy to install, energy saving and high loading capacity, etc.