Model: | zck-1100 |
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Brand: | zhenhua |
Origin: | Made In China |
Category: | Industrial Supplies / Other Industrial Supplies |
Label: | Coating Equipment |
Price: |
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Min. Order: | 1 pc |
Last Online:04 Nov, 2013 |
The controllable programmer PLC and touching screen (HMI)make up the fully automatic electric controlling system. It is with high-power magnetic control supply, constant flow output to avoid target poisoning.
Technical parameter specification
Model |
ZCK-1200 |
ZCK-1400 |
ZCK-1600 |
ZCK-1800 |
|
Chamber Size |
1200x1500 |
1400x1950 |
1600x1950 |
1800x1950 |
|
Coating Film Type |
Multi-function metal film, compound film, transparent conduction film, reflective coating film, EMI and decorative film. |
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Supply Type |
DC magnetic control supply & high voltage ion bombardment supply |
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column target |
DC magnetic control target, mid-frequency twins target, planer target |
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Vacuum Chamber |
vertical double / single door |
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Vacuum System |
slide valve pump & roots pump & diffusion pump & maintaining pump (optional: molecule pump, deep cold pump and deep cold system) |
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Inflation System |
mass flow controller (1-4 ways) |
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Ultimate Vacuum |
6X10-4Pa(unloaded and clean) |
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Pumping Time |
From atmosphere to 5X10-3Pa less than 15minutes |
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Rotation |
6/8/9 shafts rotation and revolution /stepless speed regulation of frequency conversion |
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Controlling Way |
manual & semi automatic & fully automatic / PLC& touching screen |
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Remark |
Can be designed and made according to customers’ request |
The above is for your information only.