| Model: | PT- CVD |
|---|---|
| Brand: | Protech |
| Origin: | Made In China |
| Category: | Electronics & Electricity / Other Electrical & Electronic |
| Label: | CVD furnace , CVD , FURNACE |
| Price: |
US $3000
/ pc
|
| Min. Order: | 1 pc |
| Last Online:04 Mar, 2015 |
CVD system consists of high temperature tube furnace,high vacuum system,Multi-channel precision digital flow control system,automatic pressure control system components.It can achieve up
0.001Pa~0.0001Pa vacuum chemical vapor deposition gas mixture and diffusion test.It is suitable for the universities,
research industrial and mining enterprises to do high temperature sintering atmosphere,reducing atmosphere,CVD/CVI
experiment,especially for vacuum coating,nano film materials preparation,nanowire growth etc.
Reaction pipe clean pollution-free
Over-temperature alarm multiple protection
Can input N2,Ar2 and other gases
Highly automated control can save manpower cost unattended.
Specifications
|
|
Model |
PT-CVD-1200 |
PT-CVD-1700 |
|
Tube furnace |
Voltage |
4Kw |
≤6Kw |
|
Tube size |
Φ50/60/80/100✳1000mm Customized) |
||
|
Tmax℃ |
1150℃ |
1650℃ |
|
|
Thermocouple |
N type |
B type |
|
|
Sealing method |
Stainless steel water-cooled fast extrusion sealing flange |
||
|
Vacuum system |
|
ZK-F |
ZK-K |
|
Vacuum range |
0.1~0.001 |
0.1~0.01Pa |
|
|
Ultimate vacuum |
5.0*10-5Pa |
5.0*10-4Pa |
|
|
Vacuum pump |
Rotary vane vacuum pump+Molecular pump |
Rotary vane vacuum pump+Diffusion pump |
|
|
Cooling type |
Air cooling |
Water cooling |
|
|
Pumping speed |
110L/S |
100L/S |
|
|
Vacuum gauge |
Digital Vacuum Gauge |
Composite vacuum gauge |
|
|
Gas supply system
|
|
PT-3Z |
PT-3F |
|
Flowmeter |
3 rods MFC flowmeter |
3 rods floatmeter |
|
|
Needle valve |
304 Stainless steel |
||
|
Pressure range |
-0.1-0.15 MPa |
||
|
Control range |
2%～100% |
||
|
A rods range |
0～100SCCM |
0～100ml |
|
|
B rods range |
0～200SCCM |
16～160ml |
|
|
C rods range |
0～500SCCM |
25～250ml |
|
Company information:
Zhengzhou Protech Mechanical Equipment Co.,Ltd.-owned by Protech(China) Holding Limited,is founded
by a group of technology enthusiatic people who are devoted to Providing the newest technology and
innovation in different fields,and serving various clients worldwide for it’s applications.
Our products mainly include laboratory and industrial high temperature furnace and heating elements.
Like muffle furnace,tube furnace,dental furnace,vacuum furnace,atmosphere furnace,gold melting furnace
CVD/PECVD system etc.We have our own manufacturing base factory as while as many sub-contracting
factories,Which enable us a reliable manufacturing ability and quality control system.
