| Model: | PT PECVD |
|---|---|
| Brand: | Protech |
| Origin: | Made In China |
| Category: | Electronics & Electricity / Other Electrical & Electronic |
| Label: | PECVD , PECVD furnace , furnace |
| Price: |
US $4000
/ pc
|
| Min. Order: | 1 pc |
| Last Online:04 Mar, 2015 |
PT-O1200-4C-PECVD is a compact PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system,
which consists of 500W RF plasma source, 3.14" O.D split tube furnace, 4 channels precision mass flow meter with gas
mixing tank, and high quality mechanical pump.
Preparation of nano materials
Preparation of nano materials
Preparation of nano materials
Passivation of semiconductor devices and integrated circuits
Features:
Reaction pipe clean pollution-free
Plasma generator power(0-500W adjustable)
Over-temperature alarm multiple protection
Can input N2,Ar2 and other gases
Highly automated control can save manpower cost unattended.
|
Model |
PT-O1200-4CPECVD |
|
|
Tube Furnace |
Display |
LED |
|
|
Max. Temperature |
1200℃ |
|
|
Continuous Woking Temp. |
≤1100℃ |
|
|
Heating Rate |
0~20℃/min |
|
|
Temperature Zone |
Single |
|
|
Accuracy |
±1℃ |
|
|
Tube Size |
Φ80*1200mm |
|
|
Temperature Control |
PID automatic control via SCR power control |
|
|
Heating curves |
30 steps programmable |
|
|
Heating zone |
440mm |
|
|
constant heating zone |
150mm |
|
|
Power |
220V, 50 Hz, single phase at max. 4KW |
|
Plasma RF Power
|
Output Power |
5 -500W adjustable with ± 1% stability |
|
|
RF frequency |
13.56 MHz ±0.005% stability |
|
|
Reflection Power |
200W max. |
|
|
Matching |
Automatic |
|
|
RF Output Port |
50 Ω, N-type, female |
|
|
Noise |
<50 dB. |
|
|
Cooling |
Air cooling. |
|
|
Power |
220V, 50Hz |
|
Anti-corrosive Pressure Gauge |
3.8x10-5 to 1125 Torr measurement range Anti-corrosive, gas-type independent |
|
|
Vacuum Pump and valve |
Heavy Duty Rotary Vane Vacuum Pump with max. vacuum pressure 10-2 torr. KFD25 adapter and stainless steel pipe are connected between pump and tube flange with precision ball valve Digital vacuum pressure gauge and display are installed with the furnace |
|
|
Mass Flow meters |
Four precision mass flow meters : MFC 1: Gas flow range from 0~100 sccm MFC 2&3: Control range from 0~200 sccm MFC 4: Control range from 0~500 sccm One gas mixing tank is installed on bottom case with liquid release valve 4 stainless steel needle valves is installed on left side of bottom case to control 4type gases mixing manually Gas inlet fitting: four 1/4NPS Gas outlet fitting: four 1/4NPS |
|
