| Model: | CP200 |
|---|---|
| Brand: | CHOTEST |
| Origin: | Made In China |
| Category: | Electronics & Electricity / Electronic Instrument / Electronic Measurment Apparatus |
| Label: | profiler , nano measurement , semiconductor |
| Price: |
US $1
/ pc
|
| Min. Order: | 1 pc |
| Last Online:21 Oct, 2024 |
Product Description
Stylus Nano Profiler - CP200
Stylus Nano Profiler CP200 is an ultra-precision contact measuring instrument for measurement of surface roughness and microscopic profile, such as micro-nano step height, film thickness.The CP200 uses a displacement sensor with sub-angstrom resolution, ultra-low noise signal acquisition, ultra-fine motion control, and calibration algorithms technology with excellent performance. Its contact force is extremely small, and there are no special requirements for measuring surface reflection characteristics, material types, and material hardness, consequently, it is widely used to measure microscopic surface for industries of semiconductors and compound semiconductors, high-brightness LEDs, solar energy, MEMS micro-electromechanical systems, touch screens, automotive and medical equipment.
Parameters
| Model No. | CP200 | |
| Measurement Technology | Stylus Scanning | |
| Navigation Camera | 5MP pixels colorful camera, FOV 2200×1700μm | |
| Sensor | Ultra low Inertia, LVDC sensor | |
| Measuring Force | 1-50mg Adjustable | |
| Stylus | Tip radius 2μm, angle 60° | |
| Object
Table |
XY Travel Range | 150mm×150mm, Motorized |
| Rotation | 0~360°, Motorized | |
| Max Scanning Length | 55mm | |
| Max Sample Height | 50mm | |
| Max Wafer Size | 150mm(6”), 200mm(8”) | |
| Step Height Repeatability | 5 Å @ Range 330μm/ 10 Å @ Range 1mm (Measure step height 1μm, 1δ) | |
| Sensor Range*1 | 330μm or 1mm | |
| Vertical Resolution | Resolution<0.01 Å(When the grade is 13μm) | |
| Scanning Speed | 2μm/s ~ 10mm/s | |
| Size(L×W×H) | 640×650×530mm | |
| Weight | 40kg | |
| Input | AC100~240V, 50/60 Hz, 200W | |
| Working Environment | Humidity: 30~40% RH(No condensation);
Temp.: 16~25°C(Fluctuation < 2°C/h); Audio noise: ≤80d; Ground vibration: 6.35μm /s(1~ 100Hz); Air laminar flow: ≤ 0.508 m/s(Downward flow) |
|
Remark:
*1 The sensor range can only be selected either 330μm or 1mm.
Functions
Applications
Stylus Nano Profiler CP200 has strong adaptability to application scenarios. It has no special requirements on the reflectivity characteristics, material type and hardness of the sample being tested. It can be widely used in industrial enterprises and scientific research institutions such as universities and colleges in various industries such as semiconductors, solar photovoltaics, optical processing, LEDs, MEMS devices, and micro-nano material preparation. Its accurate characterization of surface microscopic morphology parameters is of great significance for the evaluation of related materials, performance analysis and improvement of processing technology.
