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High temperature diffusion furnace, low temperature passivation furnace 1High temperature diffusion furnace, low temperature passivation furnace 2High temperature diffusion furnace, low temperature passivation furnace 3High temperature diffusion furnace, low temperature passivation furnace 4High temperature diffusion furnace, low temperature passivation furnace 5
  • High temperature diffusion furnace, low temperature passivation furnace 1
  • High temperature diffusion furnace, low temperature passivation furnace 2
  • High temperature diffusion furnace, low temperature passivation furnace 3
  • High temperature diffusion furnace, low temperature passivation furnace 4
  • High temperature diffusion furnace, low temperature passivation furnace 5

High temperature diffusion furnace, low temperature passivation furnace

Model:CL
Brand:chenli
Origin:Made In China
Category:Industrial Supplies / Electrical & Electronic Product Equipment
Label:Diffusion furnace , Oxidizer , Passivation furnace
Price: ¥220000 / pc
Min. Order:1 pc
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Member Information

Detail

Qingdao Chenli Electronics Co., Ltd

Biz MemberShan Dong - China
Last Online:21 Dec, 2024

Product Description

1. Appearance: Single tube vertical, heated

 

2. Silicon wafer size: 156 * 156 square/quasi square

 

3. Working temperature range: 400-1200 ℃

 

4. Length of constant temperature zone: ≥ 300mm, capable of loading 10 156 * 156 square silicon wafers at a time, back-to-back loading mode, equipped with Shiyingzhou

 

5. Accuracy of constant temperature zone: ± 0.5 ℃/300mm

 

6. Gas system: Three way gas system, using imported MKS mass flow meters, pneumatic valves, and other imported components

 

7. Temperature control system: PLC+touch screen programmable control mode, automatic and manual can be easily switched. The temperature control system adopts imported temperature controller, and the temperature and flow are automatically adjusted according to the process

 

8. Diffusion method: The equipment is equipped with a vacuum system and supports negative pressure diffusion method

 

9. Exhaust gas treatment: The equipment is equipped with an exhaust gas treatment system, which uses a solution to absorb harmful components in the exhaust gas

 

10. Cooling system: The equipment is equipped with a cold water system to protect the sealing device and cool the heater housing

 

11. Alarm and protection: Automatic alarm and protection for overheating, disconnection, water shortage, and vacuum abnormalities in the system


Product Image

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Send Inquiry to this Member

Qingdao Chenli Electronics Co., Ltd

Building 3, Jimo Technological Innovation Valley, Liandong U Valley, No. 285, Mount Taishan 3rd Road, Jimo District, Qingdao, Shandong Province

Phone:
+86-13869885308
Fax:
+86-13869885308
Contact:
jiang (Marketing Department)
Mobile:
13869885308

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