機組型號

Model

泵型號 Pump Model

抽氣速率Pumping Speed

( L/s )

極限壓力

Ultimate Pressure

進氣口徑Inlet  Diam.

( mm )

排氣口徑Outlet Diam.

( mm )

配用功率Motor Power( kW )

主泵

Brier pump

前級泵Backing pump

主泵

Brier pump

前級泵Backing pump

Ⅰ

Ⅱ

( Pa )

( Torr )

Ⅰ

Ⅱ

JZP2H70-4

ZJP-70

2H-15

—

70

2×10-2

1.5×10-4

80

32

1.1

2.2

—

JZP2H150-5

ZJP-150

2H-30G

—

150

2×10-2

1.5×10-4

100

50

2.2

4

—

JZP2H300-6

ZJP-300

2H-50GAP

—

300

2×10-2

1.5×10-4

150

50

4

5.5

—

JZPH300-4P

ZJP-300

H-70GAP

—

300

1×10-1

7.5×10-4

150

50

4

7.5

—

JZPH300-2

ZJP-300

H-150G

—

300

1×10-1

7.5×10-4

150

80

4

11

—

JZPH600-8

ZJP-600

H-70G

—

600

1×10-1

7.5×10-4

200

50

7.5

7.5

—

JZPH600-4

ZJP-600

H-150G

—

600

1×10-1

7.5×10-4

200

80

7.5

11

—

JZPH1200-8

ZJP-1200

H-150G

—

1200

1×10-1

7.5×10-4

250

80

11

11

—

JZPH600-42

ZJP-600

ZJP-150

H-70G

600

2×10-2

1.5×10-4

200

50

7.5

2.2

7.5

JZP2H2500-24

ZJP-2500

ZJP-1200

2×2H-150GA

2500

2×10-2

1.5×10-4

320

80

22

11

2×15