1. Mechanical :
(1).Heavy & stable benchtop base
(2).8" wafer Hot Chuck chuck , temperature room to 200 degree
(3).Vacuum on-off switch to control each vacuum ring
(4).8" x 8" travel X-Y stage with big knob driven
(5).Chuck Z-axis up-down control, travel: 5 mm
(6).U-shape platen with 6 points support and 20mm fine adjusted up-down
(7).Lift lever for platen quick up-down
(8).Fast pull-out Y stage for easy loading/unloading sample 

2.Optical : 
*Stereo Zoom Microscope :
*30X eyepiece ,1～6.5X Zoom ,total magnification :30～195X 

3. Micropositioner :
 AH-08 Micropositioner : 
*Base type: Vacuum base, magnetic reverse base, magnetic base
*Operation type: Left hand, Right hand
*-->X-Y-Z Travel: 12mm x 12mm x 12mm
*-->Leadscrew driven
*100 Threads per inch (T.P.I), 0.7 um resolution
*-->Linear Motion
*-->Big tilt angle tip holder mount
*-->Magnetic reverse base
*-->Left hand