Model and Technical Parameters of VAKIA-REC Series Vacuum Resistance Evaporation Coating Machine |
Performance/Model |
REC-900 |
REC-1000 |
REC-1200 |
REC-1400 |
REC-1500 |
REC-1800 |
Structure of vacuum chamber |
Vertical double door, vertical single door, horizontal single door and rear vacuum acquisition system |
Power supply type |
Resistance evaporation power supply, ion bombardment power supply |
Size of coating chamber |
900*H1100mm |
1000*H1200mm |
1200*H1500mm |
1400*H1800mm |
1500*H1900mm |
1800*H2000mm |
Material of coating chamber |
High-quality medium carbon steel or stainless steel |
Limit vacuum |
8.0*10 -4 Pa |
8.0*10 -4 Pa |
8.0*10 -4 Pa |
8.0*10 -4 Pa |
8.0*10 -4 Pa |
8.0*10 -4 Pa |
Pump-down time (no-load) |
Pump the atmosphere to 5.0*10 -2 Pa ≤ 8 minutes |
Vacuum acquisition system |
Diffusion pump or molecular pump + Roots pump + Mechanical pump + Holding pump
(the specific model can be configured according to customer requirements) |
Evaporation power |
15KW |
15KW |
20KW |
25KW |
30KW |
35KW |
Total power |
35KW |
35KW |
50KW |
70KW |
85KW |
105KW |
Cooling mode |
Water circulation cooling mode, cooling water tower or industrial water cooler or deep cooling system. (Provided by customers) |
Rotating mode of workpiece turntable |
Planetary revolution and autorotation, variable frequency speed regulation (controllable and adjustable) |
Control mode |
Manual/automatic integration mode, touch screen operation, PLC or computer control |
Alarm and protection |
Alarm water shortage, overcurrent and overvoltage, open circuit and other abnormal conditions of pumps, targets and so on and execute relevant protective measures and electric interlock function |
Equipment area |
W3m*L3m |
W3m*L3m |
W3.5m*L4m |
W5m*L5m |
W6m*L6m |
W6m*L8m |
Other technical parameters |
Water Pressure ≥ 0.2MPa, Water Temperature ≤ 25º C, Air Pressure: 0.5-0.8MPa |
Remarks |
The specific configuration of coating equipment can be designed according to process requirements of coating products |