1 Overview: This equipment can be used for developing and fixing on 2 "~8" silicon in semiconductor technology  which has advanced technology, strong consistency,applicable to the scale of production.

2 Material of whole  equipment  are imported.

3 The equipment has the double grooves, each row of 7 tanks, each with a set of mechanical hand, two rows can independently complete the corresponding procedure at the same time.

4 The equipment is manual when loading and fetching , the other process can be automatically completed.

5 Per slot loading capacity: 50 tablet / batch (25 / basket, two baskets).

6 Work area cleanliness: level 100.

7 Technology transfer time between  slots: Tm AX = 3.5S