1 process; feeding, spray, etching, rinsing, etching, spray,blanking

2.Conversion between etching bath and washing is finished by  imported SEW driven  mechanical hand, to quickly realize the wafer conversion between the two groove silicon.

3 Corrosion groove is equipped with American PTFE heater, temperature, liquid level sensor.

4 Cleaning tank is equipped with an overflow device, and N2 bubbling device