Small size pzt linear positioner nanometer piezo piezoelectric actuator driving

Small size pzt linear positioner nanometer piezo piezoelectric actuator driving
Model:XP-611
Brand:coremorrow
Origin:Made In China
Category:Electronics & Electricity / Other Electrical & Electronic
Label:piezoelectric , pzt , piezo piezoelectric
Price: -
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Product Description

XP-611 is an X-axis or Z-axis piezo nanopositioning stage. It adopts amplified mechanism and built-in high-performance piezo actuator. It could realize 100μm displacement in X-axis or Z-axis. Closed-loop version has high positioning accuracy and is ideal for precision positioning and scanning.

Characteristics 

• X/Z axis motion

• Small size

• Max stroke to 100μm

• Fast response time

• Vacuum version available

High Precision and High Reliability

CoreMorrow XP-611 has excellent design structure, small size, 100μm stroke, built-in high-reliability piezo actuators, and configured with high-precision sensor. Positioning accuracy could reach nanometer level, it has been applied to industry precision automated processing.

CoreMorrow offers customized service. The following image shows the customized XYZ axes piezo stage based on XP-611.

Small Size, Short Settling Time

XP-611 adopts the principle of mechanism amplification design. It is small in size and compact in structure. The size of XP-611. X is only 35×35×20mm, which is easy to integrate with other equipment.

The max displacement coud be up to 100μm, the unloaded resonant frequency is high, the response speed is fast, and the step time of 100μm is 0.8ms. This product has won the favor of industrial users with its high reliability and high cost performance.

Applications

• Microscopic imaging

• Nanopositioning

• Biotechnology

• Semiconductor technology

• Precision positioning

• Micromanipulation

Technical Data

Type

(S-Closed loop ,K-Open loop)

XP-611.X100S

XP-611.X100K

XP-611.Z100S

XP-611.Z100K

Units

Active axes

X

Y /

Travel range(0~120V)

80 80

μm±10%

Travel range(0~150V)

100 100

μm±10%

Sensor

SGS/-

SGS/

/

Closed/open loop resolution

3/1

3/1

nm

Closed-loop linearity

0.2/-

0.2/-

%F.S.

Repeatability

0.05/-

0.05/-

%F.S.

Pitch/yaw/roll

<15

<15

μrad

Push/pull force capacity

30/10

30/10

N

Stiffness

0.3

0.3

N/μm±20%

Unloaded resonant frequency

0.28

0.28

kHz±20%

Closed/open-loop unloaded Steptime

10/0.8

10/0.8

ms±20%

Closed-loop operating frequency(-3dB)

50 (unloaded)

-

Hz±20%

Load capacity

0.8

1.2

kg

El. capacitance

1.8

1.8

μF±20%

Material

Steel, Aluminum

Steel, Aluminum

/

Mass

80

80

g±5%

 

Small size pzt linear positioner nanometer piezo piezoelectric actuator driving  1Small size pzt linear positioner nanometer piezo piezoelectric actuator driving  2

Member Information

CoreMorrow Ltd.
Country/Region:Hei Long jiang - China
Business Nature:Manufacturer
Phone:18944636468
Contact:CoreMorrow (Marketing & Sales)
Last Online:18 Apr, 2024