Model: | XP-611 |
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Brand: | coremorrow |
Origin: | Made In China |
Category: | Electronics & Electricity / Other Electrical & Electronic |
Label: | piezoelectric , pzt , piezo piezoelectric |
Price: |
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Min. Order: | - |
XP-611 is an X-axis or Z-axis piezo nanopositioning stage. It adopts amplified mechanism and built-in high-performance piezo actuator. It could realize 100μm displacement in X-axis or Z-axis. Closed-loop version has high positioning accuracy and is ideal for precision positioning and scanning.
Characteristics
• X/Z axis motion
• Small size
• Max stroke to 100μm
• Fast response time
• Vacuum version available
High Precision and High Reliability
CoreMorrow XP-611 has excellent design structure, small size, 100μm stroke, built-in high-reliability piezo actuators, and configured with high-precision sensor. Positioning accuracy could reach nanometer level, it has been applied to industry precision automated processing.
CoreMorrow offers customized service. The following image shows the customized XYZ axes piezo stage based on XP-611.
Small Size, Short Settling Time
XP-611 adopts the principle of mechanism amplification design. It is small in size and compact in structure. The size of XP-611. X is only 35×35×20mm, which is easy to integrate with other equipment.
The max displacement coud be up to 100μm, the unloaded resonant frequency is high, the response speed is fast, and the step time of 100μm is 0.8ms. This product has won the favor of industrial users with its high reliability and high cost performance.
Applications
• Microscopic imaging
• Nanopositioning
• Biotechnology
• Semiconductor technology
• Precision positioning
• Micromanipulation
Technical Data
Type (S-Closed loop ,K-Open loop) |
XP-611.X100S XP-611.X100K |
XP-611.Z100S XP-611.Z100K |
Units |
Active axes |
X |
Y | / |
Travel range(0~120V) |
80 | 80 |
μm±10% |
Travel range(0~150V) |
100 | 100 |
μm±10% |
Sensor |
SGS/- |
SGS/ |
/ |
Closed/open loop resolution |
3/1 |
3/1 |
nm |
Closed-loop linearity |
0.2/- |
0.2/- |
%F.S. |
Repeatability |
0.05/- |
0.05/- |
%F.S. |
Pitch/yaw/roll |
<15 |
<15 |
μrad |
Push/pull force capacity |
30/10 |
30/10 |
N |
Stiffness |
0.3 |
0.3 |
N/μm±20% |
Unloaded resonant frequency |
0.28 |
0.28 |
kHz±20% |
Closed/open-loop unloaded Steptime |
10/0.8 |
10/0.8 |
ms±20% |
Closed-loop operating frequency(-3dB) |
50 (unloaded) |
- |
Hz±20% |
Load capacity |
0.8 |
1.2 |
kg |
El. capacitance |
1.8 |
1.8 |
μF±20% |
Material |
Steel, Aluminum |
Steel, Aluminum |
/ |
Mass |
80 |
80 |
g±5% |
CoreMorrow Ltd. | |
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Country/Region: | Hei Long jiang - China |
Business Nature: | Manufacturer |
Phone: | 18944636468 |
Contact: | CoreMorrow (Marketing & Sales) |
Last Online: | 18 Apr, 2024 |