Main technical parameters

◆ Structural type: horizontal hot wall type

Working temperature range: 300-1280 ℃

◆ Constant temperature zone length and accuracy: ± 0.5 ℃/1080mm

Gas flow rate setting accuracy: ± 1% F S

◆ Airtightness of the pneumatic system: 1×10-7pa.m3/s

Process uniformity: ≤± 5% (30~60 ohms)

Control mode: Industrial microcomputer control

◆ Record the number of process curves and steps without restriction