AZO靶材 AZO Target

產品說明Product description

AZO靶材是鋅鋁氧化物功能陶瓷材料，主要應用於磁控濺射制備AZO透明導電薄膜。採用粉末冶金，燒結工藝，多個靶管拼接貼合為AZO靶材成品。

AZO target is a functional zinc aluminum oxide ceramic material, which is used for deposition of AZO transparent conductive thin films with magnetron sputtering. It is produced by suing power metallurgy and sintering process, in the form of tube/planar segments that are bonded into AZO target.

AZO旋轉靶/平面靶 Rotary/ Planar AZO target

靶材尺寸 Dimension

-靶材外徑(Target outer diameter）∅151-160 mm

-鋼管直徑(Stainless steel tube diameters) OD 133 mm/ID 125 mm

-長度（Length）≤4 m

-按圖紙要求加工(According to customized drawings)

應用領域Applications

-薄膜太陽能電池Thin film solar cells

-Low-E鍍膜玻璃Low-E glasses

-汽車鍍膜玻璃Automotive glasses

產品特點Product features

-密度高，成膜質量好。

High-density target leading to high quality films

-使用功率高，為13 kM/m。

Sputtering power of as high as 13 kW/m.

-濺射速率、使用效率比同類產品高。

Sputtering rate and utilization efficiency that are high than the products of competitors